Tantalum Silicide (Ta5Si3) Sputtering Target
CAS #: 12067-56-0
Product Code : ESi-A594-CU-CU
CAS #: 12067-56-0
Linear Formula: Ta5Si3
MDL Number: MFCD00678396
EC No.: 235-081-3
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Synonyms
Pentatantalum trisilicide
Compound Formula: Si3Ta5
Molecular Weight: 989
Appearance: Solid
Melting Point: N/A
Boiling Point: N/A
Density: N/A
Solubility in H2O: N/A
Exact Mass: 988.67076
Monoisotopic Mass: 988.67076
Health & Safety Information
Signal Word: N/A
Hazard Statements: N/A
Hazard Codes: N/A
Risk Codes: N/A
Safety Statements: N/A
Transport Information: N/A
Chemical Identifiers
Linear Formula: Ta5Si3
Pubchem CID: 6336981
MDL Number: MFCD00678396
EC No.: 235-081-3
IUPAC Name: silicon; tantalum
Beilstein/Reaxys No.: N/A
SMILES: [Si].[Si].[Si].[Ta].[Ta].[Ta].[Ta].[Ta]
InchI Identifier: InChI=1S/3Si.5Ta
InchI Key: VGQSEFBWEDYXLE-UHFFFAOYSA-N
