Silicon Nitride Sputtering Target
CAS #: 12033-89-5
Product Code : E-N-A824-CU-CU
CAS #: 12033-89-5
Linear Formula: Si3N4
MDL Number: MFCD00011230
EC No.: 234-796-8
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Synonyms
N/A
Molecular Weight: 140.28
Appearance: Silvery
Melting Point: N/A
Boiling Point: N/A
Density: 2.2 to 3.5 g/cm3
Solubility in H2O: N/A
Poisson's Ratio: 0.24 to 0.27
Young's Modulus: 140 to 310 GPa
Thermal Conductivity: 12 to 31 W/m-K
Thermal Expansion: 2.5 to 3.2 µm/m-K
Electrical Resistivity: 11 to 12 10x Ω-m
Specific Heat: 720 to 800 J/kg-K
Health & Safety Information
Signal Word: N/A
Hazard Statements: N/A
Hazard Codes: N/A
Risk Codes: N/A
Safety Statements: N/A
Transport Information: N/A
Chemical Identifiers
Linear Formula: Si3N4
Pubchem CID: N/A
MDL Number: MFCD00011230
EC No.: 234-796-8
IUPAC Name: N/A
Beilstein/Reaxys No.: N/A
SMILES: N/A
InchI Identifier: N/A
InchI Key: N/A
